Study on preparation of nanograin metal insulator film

Ziqiang Zhao, Luncun Wei, Hao Wang, Yuncheng Zhong, Xiting Lu

Research output: Contribution to journalArticlepeer-review


A machine using magnetic control sputtering atom and evaporating insulator medium has been introduced. Several kinds of nanograin metal-insulator films, such as Cu: CaF2 and Ti: CaF2 films, were successfully prepared. Many kinds of function film series, such as solid metal and semiconductor clusters, can be prepared. The size of cluster embedded in insulator is from 10 nm to 70nm. the Cu cluster and CaF2 medium are both polycrystalline structures.

Original languageEnglish (US)
Pages (from-to)534-535
Number of pages2
JournalGongneng Cailiao/Journal of Functional Materials
Issue number6
StatePublished - Jan 1 1996

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


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