Studies of preparing method of nano grain metal-insulator film Cu:CaF2

Zi Qiang Zhao, Lun Cun Wei, Hao Wang, Yun Cheng Zhong, Xi Ting Lu

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


A machine to prepare nano grain metal-insulator films, for example Cu:CaF2 film, by means of magnetron sputtering generating clusters and at the same time evaporating insulator medium, is introduced. This machine is suitable for almost all solid metal and semiconductor clusters. And with it, many kinds of function film series can be prepared. The size of cluster embedded in insulator is from 10 to 70 nm. The Cu cluster and medium CaF2 are both polycrystalline structure.

Original languageEnglish (US)
Pages (from-to)240-242
Number of pages3
JournalNuclear Science and Techniques/Hewuli
Issue number4
StatePublished - Jan 1 1996

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Nuclear Energy and Engineering


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